
The global market for EUV Lithography Pellicle was valued at US$ 78.8 million in the year 2024 and is projected to reach a revised size of US$ 171 million by 2031, growing at a CAGR of 8.6% during the forecast period.
In a typical semiconductor process, a thin protective film is usually placed on the surface of the photomask to protect it from contaminants. This thin film, called a pellicle, prevents undesirable conditions or defects in the wafer circuit pattern, thereby protecting the IC chip from potential damage. In addition, the mask protective film is also a consumable that needs to be replaced regularly, and because the light source wavelength of EUV lithography equipment is shorter, the protective film needs to be thinner to increase light transmittance.
Initially, the pellicle was a single-layer structure with a core layer made of polysilicon. Since 2021, EUV pellicle have adopted composite materials. Its key components now consist of alternating molybdenum disilicide (MoSiâ‚‚) and silicon (Si) layers to form a multi-layer structure. EUV transmittance (EUVT) is a key performance indicator of EUV pellicle. The transition from a single-layer structure to a multi-layer structure has increased EUVT from about 82% to about 90%. The next generation of film technology will go beyond structural changes (from single-layer to multi-layer) and introduce material advances, leading to the emergence of CNT pellicle.
Driven by advances in artificial intelligence (AI) and computing technology, the semiconductor industry's demand for advanced chips continues to grow, with the fastest growth in chips below 7nm manufactured using EUV technology. In advanced processes of 7nm and below, the pattern size on the mask may be only tens of nanometers, which places extremely strict requirements on the uniformity and defect control of the Pellicle. The next generation of high-power EUV lithography machines operates at more than 500W, and EUV films are needed to protect the photomask from particle contamination during chip production.
In recent years, the phenomenon of chipmakers adopting extreme ultraviolet (EUV) processes in their advanced chip manufacturing is rapidly increasing. To meet this growing demand, many companies are developing protective films for EUV processes.
ASML launched its first EUV pellicle in 2019 and licensed the technology to Mitsui Chemicals, which began mass sales in 2021. Since then, ASML has made improvements to its pellicle. It is reported that Mitsui Chemicals' next-generation CNT pellicle production facility will be completed by the end of 2025.
In 2021, South Korean company S&S Tech developed a pellicle with a transmittance of more than 90%. FST's EUV pellicle is still in the development stage.
Canatu has been working with Imec since 2015 to develop CNT pellicle to meet performance targets such as life and transmittance, thermal durability, permeability and strength.
Report Scope
This report aims to provide a comprehensive presentation of the global market for EUV Lithography Pellicle, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding EUV Lithography Pellicle.
The EUV Lithography Pellicle market size, estimations, and forecasts are provided in terms of output/shipments (K Sqm) and revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. This report segments the global EUV Lithography Pellicle market comprehensively. Regional market sizes, concerning products by Type, by Application, and by players, are also provided.
For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.
The report will help the EUV Lithography Pellicle manufacturers, new entrants, and industry chain related companies in this market with information on the revenues, production, and average price for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.
Âé¶¹Ô´´ Segmentation
By Company
Mitsui
S&S Tech
Canatu
TSMC
by Type
Transmittance: >90%
Transmittance: ≤ 90%
by Application
Integrated Device Manufacturer (IDM)
Foundry
Production by Region
Europe
Japan
Korea
Consumption by Region
North America
U.S.
Canada
Asia-Pacific
China
Japan
South Korea
China Taiwan
Southeast Asia
India
Europe
Germany
France
U.K.
Italy
Russia
Rest of Europe
Latin America, Middle East & Africa
Mexico
Brazil
Turkey
GCC Countries
Chapter Outline
Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by region, by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
Chapter 2: Detailed analysis of EUV Lithography Pellicle manufacturers competitive landscape, price, production and value market share, latest development plan, merger, and acquisition information, etc.
Chapter 3: Production/output, value of EUV Lithography Pellicle by region/country. It provides a quantitative analysis of the market size and development potential of each region in the next six years.
Chapter 4: Consumption of EUV Lithography Pellicle in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.
Chapter 5: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 6: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.
Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
Chapter 9: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 10: The main points and conclusions of the report.
Please Note - This is an on demand report and will be delivered in 2 business days (48 hours) post payment.
1 EUV Lithography Pellicle Âé¶¹Ô´´ Overview
1.1 Product Definition
1.2 EUV Lithography Pellicle by Type
1.2.1 Global EUV Lithography Pellicle Âé¶¹Ô´´ Value Growth Rate Analysis by Type: 2024 VS 2031
1.2.2 Transmittance: >90%
1.2.3 Transmittance: ≤ 90%
1.3 EUV Lithography Pellicle by Application
1.3.1 Global EUV Lithography Pellicle Âé¶¹Ô´´ Value Growth Rate Analysis by Application: 2024 VS 2031
1.3.2 Integrated Device Manufacturer (IDM)
1.3.3 Foundry
1.4 Global Âé¶¹Ô´´ Growth Prospects
1.4.1 Global EUV Lithography Pellicle Production Value Estimates and Forecasts (2020-2031)
1.4.2 Global EUV Lithography Pellicle Production Capacity Estimates and Forecasts (2020-2031)
1.4.3 Global EUV Lithography Pellicle Production Estimates and Forecasts (2020-2031)
1.4.4 Global EUV Lithography Pellicle Âé¶¹Ô´´ Average Price Estimates and Forecasts (2020-2031)
1.5 Assumptions and Limitations
2 Âé¶¹Ô´´ Competition by Manufacturers
2.1 Global EUV Lithography Pellicle Production Âé¶¹Ô´´ Share by Manufacturers (2020-2025)
2.2 Global EUV Lithography Pellicle Production Value Âé¶¹Ô´´ Share by Manufacturers (2020-2025)
2.3 Global Key Players of EUV Lithography Pellicle, Industry Ranking, 2023 VS 2024
2.4 Global EUV Lithography Pellicle Company Type and Âé¶¹Ô´´ Share by Company Type (Tier 1, Tier 2, and Tier 3)
2.5 Global EUV Lithography Pellicle Average Price by Manufacturers (2020-2025)
2.6 Global Key Manufacturers of EUV Lithography Pellicle, Manufacturing Base Distribution and Headquarters
2.7 Global Key Manufacturers of EUV Lithography Pellicle, Product Offered and Application
2.8 Global Key Manufacturers of EUV Lithography Pellicle, Date of Enter into This Industry
2.9 EUV Lithography Pellicle Âé¶¹Ô´´ Competitive Situation and Trends
2.9.1 EUV Lithography Pellicle Âé¶¹Ô´´ Concentration Rate
2.9.2 Global 5 and 10 Largest EUV Lithography Pellicle Players Âé¶¹Ô´´ Share by Revenue
2.10 Mergers & Acquisitions, Expansion
3 EUV Lithography Pellicle Production by Region
3.1 Global EUV Lithography Pellicle Production Value Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.2 Global EUV Lithography Pellicle Production Value by Region (2020-2031)
3.2.1 Global EUV Lithography Pellicle Production Value by Region (2020-2025)
3.2.2 Global Forecasted Production Value of EUV Lithography Pellicle by Region (2026-2031)
3.3 Global EUV Lithography Pellicle Production Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
3.4 Global EUV Lithography Pellicle Production Volume by Region (2020-2031)
3.4.1 Global EUV Lithography Pellicle Production by Region (2020-2025)
3.4.2 Global Forecasted Production of EUV Lithography Pellicle by Region (2026-2031)
3.5 Global EUV Lithography Pellicle Âé¶¹Ô´´ Price Analysis by Region (2020-2025)
3.6 Global EUV Lithography Pellicle Production and Value, Year-over-Year Growth
3.6.1 Europe EUV Lithography Pellicle Production Value Estimates and Forecasts (2020-2031)
3.6.2 Japan EUV Lithography Pellicle Production Value Estimates and Forecasts (2020-2031)
3.6.3 Korea EUV Lithography Pellicle Production Value Estimates and Forecasts (2020-2031)
4 EUV Lithography Pellicle Consumption by Region
4.1 Global EUV Lithography Pellicle Consumption Estimates and Forecasts by Region: 2020 VS 2024 VS 2031
4.2 Global EUV Lithography Pellicle Consumption by Region (2020-2031)
4.2.1 Global EUV Lithography Pellicle Consumption by Region (2020-2025)
4.2.2 Global EUV Lithography Pellicle Forecasted Consumption by Region (2026-2031)
4.3 North America
4.3.1 North America EUV Lithography Pellicle Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.3.2 North America EUV Lithography Pellicle Consumption by Country (2020-2031)
4.3.3 U.S.
4.3.4 Canada
4.4 Europe
4.4.1 Europe EUV Lithography Pellicle Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.4.2 Europe EUV Lithography Pellicle Consumption by Country (2020-2031)
4.4.3 Germany
4.4.4 France
4.4.5 U.K.
4.4.6 Italy
4.4.7 Russia
4.5 Asia Pacific
4.5.1 Asia Pacific EUV Lithography Pellicle Consumption Growth Rate by Region: 2020 VS 2024 VS 2031
4.5.2 Asia Pacific EUV Lithography Pellicle Consumption by Region (2020-2031)
4.5.3 China
4.5.4 Japan
4.5.5 South Korea
4.5.6 China Taiwan
4.5.7 Southeast Asia
4.5.8 India
4.6 Latin America, Middle East & Africa
4.6.1 Latin America, Middle East & Africa EUV Lithography Pellicle Consumption Growth Rate by Country: 2020 VS 2024 VS 2031
4.6.2 Latin America, Middle East & Africa EUV Lithography Pellicle Consumption by Country (2020-2031)
4.6.3 Mexico
4.6.4 Brazil
4.6.5 Turkey
4.6.6 GCC Countries
5 Segment by Type
5.1 Global EUV Lithography Pellicle Production by Type (2020-2031)
5.1.1 Global EUV Lithography Pellicle Production by Type (2020-2025)
5.1.2 Global EUV Lithography Pellicle Production by Type (2026-2031)
5.1.3 Global EUV Lithography Pellicle Production Âé¶¹Ô´´ Share by Type (2020-2031)
5.2 Global EUV Lithography Pellicle Production Value by Type (2020-2031)
5.2.1 Global EUV Lithography Pellicle Production Value by Type (2020-2025)
5.2.2 Global EUV Lithography Pellicle Production Value by Type (2026-2031)
5.2.3 Global EUV Lithography Pellicle Production Value Âé¶¹Ô´´ Share by Type (2020-2031)
5.3 Global EUV Lithography Pellicle Price by Type (2020-2031)
6 Segment by Application
6.1 Global EUV Lithography Pellicle Production by Application (2020-2031)
6.1.1 Global EUV Lithography Pellicle Production by Application (2020-2025)
6.1.2 Global EUV Lithography Pellicle Production by Application (2026-2031)
6.1.3 Global EUV Lithography Pellicle Production Âé¶¹Ô´´ Share by Application (2020-2031)
6.2 Global EUV Lithography Pellicle Production Value by Application (2020-2031)
6.2.1 Global EUV Lithography Pellicle Production Value by Application (2020-2025)
6.2.2 Global EUV Lithography Pellicle Production Value by Application (2026-2031)
6.2.3 Global EUV Lithography Pellicle Production Value Âé¶¹Ô´´ Share by Application (2020-2031)
6.3 Global EUV Lithography Pellicle Price by Application (2020-2031)
7 Key Companies Profiled
7.1 Mitsui
7.1.1 Mitsui EUV Lithography Pellicle Company Information
7.1.2 Mitsui EUV Lithography Pellicle Product Portfolio
7.1.3 Mitsui EUV Lithography Pellicle Production, Value, Price and Gross Margin (2020-2025)
7.1.4 Mitsui Main Business and Âé¶¹Ô´´s Served
7.1.5 Mitsui Recent Developments/Updates
7.2 S&S Tech
7.2.1 S&S Tech EUV Lithography Pellicle Company Information
7.2.2 S&S Tech EUV Lithography Pellicle Product Portfolio
7.2.3 S&S Tech EUV Lithography Pellicle Production, Value, Price and Gross Margin (2020-2025)
7.2.4 S&S Tech Main Business and Âé¶¹Ô´´s Served
7.2.5 S&S Tech Recent Developments/Updates
7.3 Canatu
7.3.1 Canatu EUV Lithography Pellicle Company Information
7.3.2 Canatu EUV Lithography Pellicle Product Portfolio
7.3.3 Canatu EUV Lithography Pellicle Production, Value, Price and Gross Margin (2020-2025)
7.3.4 Canatu Main Business and Âé¶¹Ô´´s Served
7.3.5 Canatu Recent Developments/Updates
7.4 TSMC
7.4.1 TSMC EUV Lithography Pellicle Company Information
7.4.2 TSMC EUV Lithography Pellicle Product Portfolio
7.4.3 TSMC EUV Lithography Pellicle Production, Value, Price and Gross Margin (2020-2025)
7.4.4 TSMC Main Business and Âé¶¹Ô´´s Served
7.4.5 TSMC Recent Developments/Updates
8 Industry Chain and Sales Channels Analysis
8.1 EUV Lithography Pellicle Industry Chain Analysis
8.2 EUV Lithography Pellicle Raw Material Supply Analysis
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.3 EUV Lithography Pellicle Production Mode & Process Analysis
8.4 EUV Lithography Pellicle Sales and Âé¶¹Ô´´ing
8.4.1 EUV Lithography Pellicle Sales Channels
8.4.2 EUV Lithography Pellicle Distributors
8.5 EUV Lithography Pellicle Customer Analysis
9 EUV Lithography Pellicle Âé¶¹Ô´´ Dynamics
9.1 EUV Lithography Pellicle Industry Trends
9.2 EUV Lithography Pellicle Âé¶¹Ô´´ Drivers
9.3 EUV Lithography Pellicle Âé¶¹Ô´´ Challenges
9.4 EUV Lithography Pellicle Âé¶¹Ô´´ Restraints
10 Research Findings and Conclusion
11 Methodology and Data Source
11.1 Methodology/Research Approach
11.1.1 Research Programs/Design
11.1.2 Âé¶¹Ô´´ Size Estimation
11.1.3 Âé¶¹Ô´´ Breakdown and Data Triangulation
11.2 Data Source
11.2.1 Secondary Sources
11.2.2 Primary Sources
11.3 Author List
11.4 Disclaimer
Mitsui
S&S Tech
Canatu
TSMC
Ìý
Ìý
*If Applicable.
