PVD and ALD coatings for chamber components are typically based on yttrium or aluminum oxides or may be made from aluminum oxynitride (AlON). The exact chemistry and coating thickness must be tailored to the application. The use of temperature in the chamber, processing time, and gases vary considerably depending on the device specifications, and these variables are used to select the right combination of coatings for their desired coating performance. Custom precision-engineered coatings provide the optimal balance between cost and performance. Deposition chambers contain various parts and components that either contact the device wafer directly or are exposed to process chemicals that subsequently reach the wafer. As such, material selection is critical. The corrosive chemicals used in plasma-etch chambers attack the tool component surfaces and degrade coatings. Longer exposure to hotter plasmas, which is common for 3D device processing, accelerates degradation. Particles shed from the corroded surfaces then deposit on the wafers, potentially causing device failure. Components protected with yttrium oxide deposited by plasma spray-coating or made from anodized aluminum have long been the industry norm. Although such solutions have worked for many years, the nano-scale features of advanced process nodes demand an increased level of cleanliness for every part in the system. Conventionally coated components are not rugged enough to withstand the aggressive environments inside etch and deposition chambers without impacting device yield. Plasma spray coatings are relatively rough and porous, while anodized coatings exhibit in-situ cracking that makes them degrade too readily. The complex shapes of parts inside deposition chambers also pose a challenge for spray coating, which works best when coating planar surfaces. Precision engineered, specialized coatings borrow vacuum thin film technologies associated with semiconductor wafer processing to produce coated components that can better resist the corrosion and oxidation that degrade conventional coatings. Two options are available: physical vapor deposition (PVD) and atomic layer deposition (ALD). Every precision engineered coating must exhibit a minimum level of wear and corrosion resistance in the presence of corrosive plasma/chemistry and adhere fully to the underlying substrate to create a uniformly coated surface. The geometry and material of the part being coated, the type of chamber, and the processing conditions further dictate the optimal coating chemistry and method.
The global PVD and ALD Coating for Chamber Components market size is projected to grow from US$ 52.6 million in 2024 to US$ 90.6 million in 2030; it is expected to grow at a CAGR of 9.5% from 2024 to 2030.
The 鈥淧VD and ALD Coating for Chamber Components Industry Forecast鈥 looks at past sales and reviews total world PVD and ALD Coating for Chamber Components sales in 2022, providing a comprehensive analysis by region and market sector of projected PVD and ALD Coating for Chamber Components sales for 2023 through 2029. With PVD and ALD Coating for Chamber Components sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world PVD and ALD Coating for Chamber Components industry.
This Insight Report provides a comprehensive analysis of the global PVD and ALD Coating for Chamber Components landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyses the strategies of leading global companies with a focus on PVD and ALD Coating for Chamber Components portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms鈥 unique position in an accelerating global PVD and ALD Coating for Chamber Components market.
This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for PVD and ALD Coating for Chamber Components and breaks down the forecast by Coating Method, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global PVD and ALD Coating for Chamber Components.
Global key players of PVD and ALD Coating for Chamber Components include Entegris, KoMiCo, Inficon, etc. The top three players hold a share about 50%. Asia-Pacific is the largest market, and has a share about 58%, followed by North America and Europe with share 35% and 7%, separately. In terms of Coating Method, PVD Coating Method is the largest segment, accounting for a share of 65%. In terms of application, Etching Tools is the largest field with a share about 86 percent.
This report presents a comprehensive overview, market shares, and growth opportunities of PVD and ALD Coating for Chamber Components market by product type, application, key players and key regions and countries.
Segmentation by Coating Method:
PVD Coating Method
ALD Coating Method
Segmentation by Application:
Etching Tools
Deposition Tools
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
Segmentation by Coating Method:
PVD Coating Method
ALD Coating Method
Segmentation by Application:
Etching Tools
Deposition Tools
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analyzing the company's coverage, product portfolio, its market penetration.
TOCALO Co., Ltd.
KoMiCo
Cinos
WONIK QnC
Oerlikon Balzers
Beneq
Entegris
Inficon
Please Note - This is an on demand report and will be delivered in 2 business days (48 hours) post payment.
1 Scope of the Report
1.1 麻豆原创 Introduction
1.2 Years Considered
1.3 Research Objectives
1.4 麻豆原创 Research Methodology
1.5 Research Process and Data Source
1.6 Economic Indicators
1.7 Currency Considered
1.8 麻豆原创 Estimation Caveats
2 Executive Summary
2.1 World 麻豆原创 Overview
2.1.1 Global PVD and ALD Coating for Chamber Components 麻豆原创 Size 2019-2030
2.1.2 PVD and ALD Coating for Chamber Components 麻豆原创 Size CAGR by Region (2019 VS 2023 VS 2030)
2.1.3 World Current & Future Analysis for PVD and ALD Coating for Chamber Components by Country/Region, 2019, 2023 & 2030
2.2 PVD and ALD Coating for Chamber Components Segment by Coating Method
2.2.1 PVD Coating Method
2.2.2 ALD Coating Method
2.3 PVD and ALD Coating for Chamber Components 麻豆原创 Size by Coating Method
2.3.1 PVD and ALD Coating for Chamber Components 麻豆原创 Size CAGR by Coating Method (2019 VS 2023 VS 2030)
2.3.2 Global PVD and ALD Coating for Chamber Components 麻豆原创 Size 麻豆原创 Share by Coating Method (2019-2024)
2.4 PVD and ALD Coating for Chamber Components Segment by Application
2.4.1 Etching Tools
2.4.2 Deposition Tools
2.5 PVD and ALD Coating for Chamber Components 麻豆原创 Size by Application
2.5.1 PVD and ALD Coating for Chamber Components 麻豆原创 Size CAGR by Application (2019 VS 2023 VS 2030)
2.5.2 Global PVD and ALD Coating for Chamber Components 麻豆原创 Size 麻豆原创 Share by Application (2019-2024)
3 PVD and ALD Coating for Chamber Components 麻豆原创 Size by Player
3.1 PVD and ALD Coating for Chamber Components 麻豆原创 Size 麻豆原创 Share by Player
3.1.1 Global PVD and ALD Coating for Chamber Components Revenue by Player (2019-2024)
3.1.2 Global PVD and ALD Coating for Chamber Components Revenue 麻豆原创 Share by Player (2019-2024)
3.2 Global PVD and ALD Coating for Chamber Components Key Players Head office and Products Offered
3.3 麻豆原创 Concentration Rate Analysis
3.3.1 Competition Landscape Analysis
3.3.2 Concentration Ratio (CR3, CR5 and CR10) & (2022-2024)
3.4 New Products and Potential Entrants
3.5 Mergers & Acquisitions, Expansion
4 PVD and ALD Coating for Chamber Components by Region
4.1 PVD and ALD Coating for Chamber Components 麻豆原创 Size by Region (2019-2024)
4.2 Global PVD and ALD Coating for Chamber Components Annual Revenue by Country/Region (2019-2024)
4.3 Americas PVD and ALD Coating for Chamber Components 麻豆原创 Size Growth (2019-2024)
4.4 APAC PVD and ALD Coating for Chamber Components 麻豆原创 Size Growth (2019-2024)
4.5 Europe PVD and ALD Coating for Chamber Components 麻豆原创 Size Growth (2019-2024)
4.6 Middle East & Africa PVD and ALD Coating for Chamber Components 麻豆原创 Size Growth (2019-2024)
5 Americas
5.1 Americas PVD and ALD Coating for Chamber Components 麻豆原创 Size by Country (2019-2024)
5.2 Americas PVD and ALD Coating for Chamber Components 麻豆原创 Size by Coating Method (2019-2024)
5.3 Americas PVD and ALD Coating for Chamber Components 麻豆原创 Size by Application (2019-2024)
5.4 United States
5.5 Canada
5.6 Mexico
5.7 Brazil
6 APAC
6.1 APAC PVD and ALD Coating for Chamber Components 麻豆原创 Size by Region (2019-2024)
6.2 APAC PVD and ALD Coating for Chamber Components 麻豆原创 Size by Coating Method (2019-2024)
6.3 APAC PVD and ALD Coating for Chamber Components 麻豆原创 Size by Application (2019-2024)
6.4 China
6.5 Japan
6.6 South Korea
6.7 Southeast Asia
6.8 India
6.9 Australia
7 Europe
7.1 Europe PVD and ALD Coating for Chamber Components 麻豆原创 Size by Country (2019-2024)
7.2 Europe PVD and ALD Coating for Chamber Components 麻豆原创 Size by Coating Method (2019-2024)
7.3 Europe PVD and ALD Coating for Chamber Components 麻豆原创 Size by Application (2019-2024)
7.4 Germany
7.5 France
7.6 UK
7.7 Italy
7.8 Russia
8 Middle East & Africa
8.1 Middle East & Africa PVD and ALD Coating for Chamber Components by Region (2019-2024)
8.2 Middle East & Africa PVD and ALD Coating for Chamber Components 麻豆原创 Size by Coating Method (2019-2024)
8.3 Middle East & Africa PVD and ALD Coating for Chamber Components 麻豆原创 Size by Application (2019-2024)
8.4 Egypt
8.5 South Africa
8.6 Israel
8.7 Turkey
8.8 GCC Countries
9 麻豆原创 Drivers, Challenges and Trends
9.1 麻豆原创 Drivers & Growth Opportunities
9.2 麻豆原创 Challenges & Risks
9.3 Industry Trends
10 Global PVD and ALD Coating for Chamber Components 麻豆原创 Forecast
10.1 Global PVD and ALD Coating for Chamber Components Forecast by Region (2025-2030)
10.1.1 Global PVD and ALD Coating for Chamber Components Forecast by Region (2025-2030)
10.1.2 Americas PVD and ALD Coating for Chamber Components Forecast
10.1.3 APAC PVD and ALD Coating for Chamber Components Forecast
10.1.4 Europe PVD and ALD Coating for Chamber Components Forecast
10.1.5 Middle East & Africa PVD and ALD Coating for Chamber Components Forecast
10.2 Americas PVD and ALD Coating for Chamber Components Forecast by Country (2025-2030)
10.2.1 United States 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.2.2 Canada 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.2.3 Mexico 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.2.4 Brazil 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.3 APAC PVD and ALD Coating for Chamber Components Forecast by Region (2025-2030)
10.3.1 China PVD and ALD Coating for Chamber Components 麻豆原创 Forecast
10.3.2 Japan 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.3.3 Korea 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.3.4 Southeast Asia 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.3.5 India 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.3.6 Australia 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.4 Europe PVD and ALD Coating for Chamber Components Forecast by Country (2025-2030)
10.4.1 Germany 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.4.2 France 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.4.3 UK 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.4.4 Italy 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.4.5 Russia 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.5 Middle East & Africa PVD and ALD Coating for Chamber Components Forecast by Region (2025-2030)
10.5.1 Egypt 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.5.2 South Africa 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.5.3 Israel 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.5.4 Turkey 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
10.6 Global PVD and ALD Coating for Chamber Components Forecast by Coating Method (2025-2030)
10.7 Global PVD and ALD Coating for Chamber Components Forecast by Application (2025-2030)
10.7.1 GCC Countries 麻豆原创 PVD and ALD Coating for Chamber Components Forecast
11 Key Players Analysis
11.1 TOCALO Co., Ltd.
11.1.1 TOCALO Co., Ltd. Company Information
11.1.2 TOCALO Co., Ltd. PVD and ALD Coating for Chamber Components Product Offered
11.1.3 TOCALO Co., Ltd. PVD and ALD Coating for Chamber Components Revenue, Gross Margin and 麻豆原创 Share (2019-2024)
11.1.4 TOCALO Co., Ltd. Main Business Overview
11.1.5 TOCALO Co., Ltd. Latest Developments
11.2 KoMiCo
11.2.1 KoMiCo Company Information
11.2.2 KoMiCo PVD and ALD Coating for Chamber Components Product Offered
11.2.3 KoMiCo PVD and ALD Coating for Chamber Components Revenue, Gross Margin and 麻豆原创 Share (2019-2024)
11.2.4 KoMiCo Main Business Overview
11.2.5 KoMiCo Latest Developments
11.3 Cinos
11.3.1 Cinos Company Information
11.3.2 Cinos PVD and ALD Coating for Chamber Components Product Offered
11.3.3 Cinos PVD and ALD Coating for Chamber Components Revenue, Gross Margin and 麻豆原创 Share (2019-2024)
11.3.4 Cinos Main Business Overview
11.3.5 Cinos Latest Developments
11.4 WONIK QnC
11.4.1 WONIK QnC Company Information
11.4.2 WONIK QnC PVD and ALD Coating for Chamber Components Product Offered
11.4.3 WONIK QnC PVD and ALD Coating for Chamber Components Revenue, Gross Margin and 麻豆原创 Share (2019-2024)
11.4.4 WONIK QnC Main Business Overview
11.4.5 WONIK QnC Latest Developments
11.5 Oerlikon Balzers
11.5.1 Oerlikon Balzers Company Information
11.5.2 Oerlikon Balzers PVD and ALD Coating for Chamber Components Product Offered
11.5.3 Oerlikon Balzers PVD and ALD Coating for Chamber Components Revenue, Gross Margin and 麻豆原创 Share (2019-2024)
11.5.4 Oerlikon Balzers Main Business Overview
11.5.5 Oerlikon Balzers Latest Developments
11.6 Beneq
11.6.1 Beneq Company Information
11.6.2 Beneq PVD and ALD Coating for Chamber Components Product Offered
11.6.3 Beneq PVD and ALD Coating for Chamber Components Revenue, Gross Margin and 麻豆原创 Share (2019-2024)
11.6.4 Beneq Main Business Overview
11.6.5 Beneq Latest Developments
11.7 Entegris
11.7.1 Entegris Company Information
11.7.2 Entegris PVD and ALD Coating for Chamber Components Product Offered
11.7.3 Entegris PVD and ALD Coating for Chamber Components Revenue, Gross Margin and 麻豆原创 Share (2019-2024)
11.7.4 Entegris Main Business Overview
11.7.5 Entegris Latest Developments
11.8 Inficon
11.8.1 Inficon Company Information
11.8.2 Inficon PVD and ALD Coating for Chamber Components Product Offered
11.8.3 Inficon PVD and ALD Coating for Chamber Components Revenue, Gross Margin and 麻豆原创 Share (2019-2024)
11.8.4 Inficon Main Business Overview
11.8.5 Inficon Latest Developments
12 Research Findings and Conclusion
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*If Applicable.